FT-351高溫四探針電阻率測試係統
FT-351
high temperature four probe resistivity test system
一.概述：overview
采用四探針雙電組合測量方法測試方阻和電阻率係統與高溫箱結合配置專用的高溫四探針測試探針治具與PC軟件對數據的處理和測量控製，滿足半導體材料的電導率對溫度變化測量要求，的測控軟件實時繪製出溫度與電阻，電阻率，電導率數據的變化曲線圖譜，及過程數據值的報表分析.
Adopt four probe double electric
combination test method to test square resistance and resistivity system .
Combined with high temperature box for special high temperature four-point
probe test probe jig with PC software for data processing and measurement
control. Meet the test requirements of
the conductivity of the semiconductor material to temperature change.
Advanced measurement and control software to Real-time render the change curve
of temperature and resistance, the resistivity, the electrical
conductivity data,and process data values statement analysis.
FT-351高溫四探針電阻率測試係統二.適用行業：Applicable industry:
廣泛用於：企業、高等院校、科研部門對導電陶瓷、矽、鍺單晶（棒料、晶片）電阻率、測定矽外延層、擴散層和離子注入層的方塊電阻以及測量導電玻璃（ITO）和其它導電薄膜等新材料方塊電阻、電阻率和電導率數據.
Is widely used in: Corporate. colleges and
universities and scientific research departments of conductive ceramics.
silicon. germanium single crystal (bar. wafer) resistivity. The determination
of silicon epitaxial layer and diffusion layer and ion implantation of square
resistance as well as the measurement of conductive glass (ITO) and other new
materials such as conductive films square resistance and resistivity and conductivity
data.
雙電測四探針儀是運用直線四探針雙位測量。設計符合單晶矽物理測試方法標準並參考美國 A.S.T.M 標準。
The double electric four-point probe is
used to measure the four probes in a straight line.The design conforms to the
national standard of the single-crystal silicon physical test method and the
American A.S.T.M standard.
FT-351高溫四探針電阻率測試係統
三.型號及技術參數Models and technical parameters：
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規格型號Models
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FT-351A
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FT-351B
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FT-351C
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1.方塊電阻範圍sheet resistance
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10-5～2×105Ω/□
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10-6～2×105Ω/□
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10-4～1×107Ω/□
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2.電阻率範圍resistivity range
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10-6～2×106Ω-cm
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10-7～2×106Ω-cm
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10-5～2×108Ω-cm
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3.測試電流範圍test current range
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0.1μA.μA.0μA，100µA，1mA，10mA，100 mA
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1A、100mA、10mA、1mA、100uA、10uA、1uA、0.1uA
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10mA ---200pA
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4.電流精度current accuracy
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±0.1%讀數
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±0.1讀數
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±2%
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5.電阻精度resistance accuracy
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≤0.3%
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≤0.3%
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≤10%
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PC軟件界麵
PC
software interface
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顯示：電阻、電阻率、方阻、溫度、單位換算、溫度係數、電流、電壓、探針形狀、探針間距、厚度
、電導率
LCD:
resistance.resistivity. sheet resistance.
temperature.unit conversion. temperature coefficient. current. voltage.
probe shape. probe spacing. thickness
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7.測試方式test mode
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雙電測量Double electrical measurement
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8.四探針儀工作電源working power
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AC
220V±10%.50Hz <30W
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9.整機不確定性誤差/ machine uncertain errors
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≤3%（標準樣片結果 standard samples）
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≤15%
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zui高溫度(選購)Highest temperature
(choose
and buy)
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常溫 Normal temperature -400℃；600℃；800℃；1000℃；1200℃；1400℃；1600℃
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氣氛保護（氣體客戶自備）
Atmosphere
protection(Gas was provided by customers themselves)
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常用氣體如下：氦(He)、氖(Ne)、氬(Ar)、氪(Kr)、氙(Xe)、氡(Rn)，均為無色、無臭、氣態的ink" target="_blank">單原子分子
The
usual gases are: helium (He). neon (Ne). argon (Ar). krypton (Kr). xenon
(Xe). and radon (Rn). all in colorless. odorless. gaseous monatomic
molecules.
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溫度精度
Temperature
precision
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衝溫值 Blunt temperature values：≤1-3℃；控溫精度 control precision：±1°C
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升溫速度：
rate
of temperature increase
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常溫開始400℃--800℃需要15分鍾；800℃-1200℃需要30分鍾；1400℃-1600℃需要250分鍾—300分鍾
about
15 minutes at room temperature to 400 ℃. 800 ℃;800 ℃ to 1200 ℃ need 30 minutes;1400 ℃ to 1600 ℃ to 250 minutes. 300 minutes
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高溫材料
High
temperature material
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采用複合陶瓷纖維材料，具有真空成型，高溫不掉粉的特征Adopt composite ceramic fiber material. have vacuum forming. high
temperature not drop powder
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PC軟件
PC
software
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專用測試PC軟件一套，USB通訊接口，軟件界麵同步顯示、分析、保存和打印數據！One set Special test PC software. USB communication interface.
software interface synchronization display. analysis. save and print data!
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電材料
Electrode
materials
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鎢電或鉬電
Tungsten
electrode or molybdenum electrode
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探針間距
The
probe spacing
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直線型探針，探針中心間距：4mm；樣品要求大於13mm直徑Linear
probe. probe center spacing: 4mm;Sample requirements are greater than 13mm
diameter
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標配外（選購）：
Except
standard configuration (optional)
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電腦和打印機1套；2.標準電阻1-5個；
1 .
One set computer and printer 2.Standard
resistance 1 to 5pcs
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配套方案：解決各材料狀態 --固態、液態、氣態、顆粒狀電阻、電阻率、電導率測量
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